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Explores the principles and applications of scanning electron microscopy in micro and nanofabrication, covering electron signals, charging issues, and dimensional measurements.
Covers the principles of Scanning Electron Microscopy, including SEM signals, detectors, and energy spectrum of electrons, as well as the efficiency of X-ray generation.
Covers fundamental characterization approaches for solid materials, focusing on elemental analysis, thermal analysis, microscopy, and neutron-based spectroscopies.
Covers X-Ray Photoelectron Spectrometry (XPS), a surface analysis technique developed by Kai Siegbahn, explaining its components, mechanism, and analysis methods.
Explores the fundamentals and applications of scanning probe microscopy, including STM setup, surface reconstruction, quantum tunneling, and scanning force microscopy.
