Explores the principles and applications of scanning electron microscopy in micro and nanofabrication, covering electron signals, charging issues, and dimensional measurements.
Explores surface analysis methods using electrons, ions, atoms, and photons, emphasizing the importance of ToF-SIMS for in-depth surface analysis in various fields.
Covers X-Ray Photoelectron Spectrometry (XPS), a surface analysis technique developed by Kai Siegbahn, explaining its components, mechanism, and analysis methods.
