Explores scaling laws and applications of electrostatics in MEMS, covering topics like parallel plate capacitors, zipping actuators, and MEMS gyroscopes.
Covers the physical phenomena of electrostatic transduction, including charge accumulation, capacitance, and electrostatic force, with practical examples of sensors and actuators.
Covers the introduction to Micro-Electro-Mechanical Systems (MEMS), including operating principles, elements, scaling laws, silicon choice, sensors, and actuators.
