Electromagnetic Actuation Schemes

This lecture covers various electromagnetic actuation schemes, including current-current and current-magnet setups. It explores the reasons behind the constant current density hypothesis, addressing issues like heating and electro-migration. The presentation delves into scaling and simulation in MEMS, discussing the challenges and solutions in electromagnetics applications. Examples such as electrodynamic microbeam resonators and flexural plate wave resonators are analyzed, highlighting the principles of Lorentz forces and induced voltages. The lecture also examines practical applications like electromagnetic micro-mirrors and loudspeakers, showcasing the integration of electromagnetic principles in MEMS devices.