Silicon Gauges: Piezoresistive Sensors

In course

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Description

This lecture covers the fabrication and operation of silicon gauges for piezoresistive sensors, explaining the formation of pn diodes, piezoresistive effects in semiconductors, and the impact of crystal direction on gauge factors. It also delves into the thermal drift compensation and integration of pressure sensors, discussing the challenges in assembly processes and the design of tire pressure monitoring systems.

Instructors (2)

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Official source

https://mediaspace.epfl.ch/media/0_nxg0knzd

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