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This lecture covers the principles and applications of X-ray Photoelectron Spectroscopy (XPS) for surface analysis. It explains the measurement of surface properties like chemical composition, morphology, and properties such as thermodynamic and electrical characteristics. The lecture details the XPS analysis process, including the principle of XPS, vacuum requirements, X-ray sources, and the calibration of energy scales. It also discusses the importance of clean samples, the role of vacuum pumps, and the design considerations for vacuum chambers. Additionally, it explores the interpretation of XPS spectra, background subtraction methods, and the depth profiling techniques used in XPS analysis.