Lecture
This lecture covers the transduction of motion through optical lever and interferometer detection methods, explaining how probing lasers and split laser paths are used to capture mechanical device reflections. It also discusses the implementation, resolution, integration limitations, alignment issues, and diffraction problems associated with these detection techniques. Additionally, the lecture explores transduction in the microscale, detailing various actuation and detection methods such as capacitive and piezoelectric detection. The presentation delves into the principles of capacitive detection, emphasizing voltage changes between conductive surfaces and impedance bridges. Furthermore, it examines piezoelectric detection, highlighting how mechanical stress generates charges and the coupling through bending moments. The ideal requirements for MEMS transduction, including low power consumption, high efficiency, robustness, linearity, and fast response, are also discussed.