Lecture

Piezoresistive MEMS Sensors: Working Principles and Applications

In course

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Description

This lecture covers the working principles of piezoresistive MEMS sensors, focusing on piezoresistivity, gauge factors, and fabrication technologies. It discusses the anisotropic piezoresistivity in single crystalline silicon, the gauge factor, and the effective placement of piezoresistors. Examples of piezoresistive MEMS sensors are presented, along with their applications, market overview, and product examples.

Instructor

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Official source

https://mediaspace.epfl.ch/media/0_slmti4ur

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