Etch Stop Techniques

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Related lectures (32)

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Explores dry etching techniques in semiconductor processing, from barrel reactors to modern plasma sources like ICP and ECR.

PN Junctions: Equilibrium and Built-in Potential

Covers the behavior of p-n junctions, focusing on equilibrium, built-in potential, and depletion zones.

Dry etching: fundamentals and applications

Explores the fundamentals of dry etching in a gas plasma and provides simple rules for choosing dry etchants.

Photonic Crystals: Fabrication Techniques

Delves into the fabrication techniques of photonic crystals, inspired by natural structures like butterfly wings and opal stones.

Wet Etching: Crystal Structure and Anisotropy

Explores silicon crystal structure, anisotropy in etching rates, etch mechanisms, and different etching baths in micro and nanofabrication.

Microfabrication Techniques: Tips and Sensors

Explores microfabrication techniques for nanotips and sensors, contact modes in AFM, capillary forces, and integrated sensors and actuators.

Industrial Plasmas: Sheath Formation and Plasma Etching

Explores sheath formation, plasma etching, ion velocity, and energy in industrial plasmas, emphasizing their significance for modern electronics manufacturing.

Infrared Photodetectors: Mercury Cadmium Telluride Technology

Covers the technology and applications of Mercury Cadmium Telluride photoconductors in infrared detection systems.

Thermo-mechanical Micro-actuator: Case Study

Explores the design and fabrication of a bi-morph micro-actuator and its thermo-mechanical characterization through DC and AC current applications.

Plasma Physics: Sheaths and Etching

Explores plasma formation, sheath creation, and plasma etching applications for integrated circuit manufacturing.