Micromachined Ultrasonic Transducers: PMUTs

This lecture covers the evolution of micromachined ultrasonic transducers (MUTs) over the past 30 years, focusing on the development of PMUTs. It discusses the advantages of PMUTs over conventional transducers, such as low power consumption, small size, and on-chip signal processing. The lecture explains the design and operational principles of PMUTs, including actuation methods, materials used, and time-of-flight calculations. It also explores applications of PMUTs in biometric identity verification and ultrasound fingerprint sensors, showcasing the potential for high-resolution imaging and sensing. The presentation concludes with a detailed look at PMUT array design, emphasizing fill factor optimization and sensor array configurations.