Lecture

Mechanical Surface Profiling: AFM Applications

Description

This lecture covers the use of mechanical surface profilers for film thickness measurement on MEMS devices, focusing on a bi-morph cantilever with chrome thin films. It also explores the application of atomic force microscopy (AFM) to characterize surface properties at high resolution, demonstrating its ability to measure surface roughness and provide 3D surface images. The lecture emphasizes the advantages of AFM over traditional methods, such as its high lateral resolution and non-damaging contact force, making it suitable for fragile surfaces.

About this result
This page is automatically generated and may contain information that is not correct, complete, up-to-date, or relevant to your search query. The same applies to every other page on this website. Please make sure to verify the information with EPFL's official sources.