Nanoscale MEMS: Fabrication, Tips, and Microscopy

This lecture covers the fabrication of nanoscale MEMS devices, including the microfabrication of nanotips inspired by nature and the basics of thermal oxidation. It also delves into the operation of the Atomic Force Microscope (AFM) and the scanning tunneling microscope (STM) for measuring ultrasmall forces on particles. The presentation explores the process of making very sharp tips through oxidation and mold techniques, as well as the use of standard microfabrication to create nanometer precise objects. Various methods for sharpening tips and molds are discussed, along with the importance of utilizing diffusion control and etch anisotropy for cost-efficient nanoscale features.