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3D EDX: Challenges and Applications
This lecture covers the challenges and applications of 3D Energy-Dispersive X-ray Spectroscopy (EDX). The challenges include acquisition speed, EDX map acquisition, specimen interaction, and post-processing. The applications focus on 3D microanalysis using FIB/SEM volume reconstruction, with examples such as porous ceramics and various materials. The lecture also discusses the limitations of EDX, the resolution of BSE electrons, and the quantification enhancement techniques. Additionally, it explores the use of EDX in solid oxide fuel cells and the advanced imaging techniques involved in 3D EDX analysis.