Lecture

Deep Reactive Ion Etching: High Aspect Ratio Structures

In course

Dolor nulla ipsum elit sit duis cupidatat ea. Culpa dolore consequat pariatur consequat reprehenderit dolore et est ut. Sunt Lorem amet quis labore aliqua enim esse eiusmod adipisicing.

Description

This lecture covers the process of deep reactive ion etching using an inductively coupled plasma reactor, focusing on SF and C4F8 deposition, etch rates, and total etch time. It also discusses the Bosch process, selective dry etching, and the fabrication of high aspect ratio structures.

This video is available exclusively on Mediaspace for a restricted audience. Please log in to MediaSpace to access it if you have the necessary permissions.

Watch on Mediaspace

Instructors (2)

id eiusmod aliqua ullamco

Labore cillum nostrud enim excepteur. Cupidatat anim nisi ullamco irure dolor dolore ipsum excepteur labore quis. Consequat cupidatat duis labore amet. Nisi et sit consequat adipisicing dolore cillum non laboris commodo nulla magna aute ipsum. Nisi pariatur laboris ut magna aliquip.

sit et exercitation laboris

Labore incididunt aliqua Lorem id velit nisi nulla eu culpa adipisicing officia et amet. Ad ut sint in eu cupidatat est officia cupidatat nisi est esse consequat esse aliquip. Laboris enim irure mollit exercitation ex excepteur deserunt officia in occaecat excepteur qui aliqua do. Est esse anim officia ex proident aliqua est sint ut nulla. In dolore laborum nostrud veniam non pariatur cillum ad excepteur eu ipsum. Fugiat nostrud esse proident ad dolore qui non proident excepteur ullamco laborum. Magna fugiat reprehenderit duis qui et adipisicing cillum culpa ut dolor.

Official source

https://mediaspace.epfl.ch/media/0_yoas7r0e

About this result

This page is automatically generated and may contain information that is not correct, complete, up-to-date, or relevant to your search query. The same applies to every other page on this website. Please make sure to verify the information with EPFL's official sources.

Ontological neighbourhood

Electrical engineering

Electromechanics: Microelectromechanical systems

Related lectures (41)

Graph Chatbot

Chat with Graph Search

Ask any question about EPFL courses, lectures, exercises, research, news, etc. or try the example questions below.

DISCLAIMER: The Graph Chatbot is not programmed to provide explicit or categorical answers to your questions. Rather, it transforms your questions into API requests that are distributed across the various IT services officially administered by EPFL. Its purpose is solely to collect and recommend relevant references to content that you can explore to help you answer your questions.