Covers the process of etching using wet and dry techniques, explaining definitions, steps, examples, challenges, and solutions.
Explores dry etching techniques for different materials, including continuous, pulsed, cryogenic processes, and isotropic etching using SF6.
Explores microfabrication technologies, lithography, MEMS, cleanroom processes, resolution enhancement, phase shift masks, and chip manufacturing complexity.
Explores anisotropic etching of organic films and Al alloys, emphasizing the role of Al2O3 in Al etching and presenting examples of dry etching processes.
Explores silicon etching techniques, fabrication of the Utah array, impedance measurements, and active silicon probes for neural recordings.
Explores etch stop techniques, including B implantation, electrochemical etch stops, and bulk micromachining examples in micro and nanofabrication.
