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Lecture
Lithography: Mask and Laser Writing
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Dry Etching: Techniques and Equipment
Explores various dry etching techniques for silicon and the equipment used in the process, including RF plasma sources and HF vapor phase etchers.
Wet Etching: Crystal Structure and Anisotropy
Explores silicon crystal structure, anisotropy in etching rates, etch mechanisms, and different etching baths in micro and nanofabrication.
Mask Fabrication Process
Demonstrates the practical steps involved in mask fabrication for UV lithography.
Deep Reactive Ion Etching: High Aspect Ratio Structures
Explores deep reactive ion etching for high aspect ratio structures and the Bosch process.
Glass Microfabrication by Wet Etching
Explores glass microfabrication using wet etching with hydrofluoric acid, covering etching mechanisms, additives impact, and surface effects.
Gaussian Beams: Properties and Applications
Explores Gaussian beams, beam quality, optical fibers, laser diode stacks, and mask projection systems.
Nanofabrication: Techniques and Challenges
Explores nanofabrication techniques, challenges, and the use of silicon wafers.
Brain-Computer Interfaces: Silicon Technologies
Explores the design and fabrication of Brain-Computer Interfaces using silicon-based technologies and flexible materials, emphasizing key fabrication techniques and material properties.
Nanoscale MEMS: Fabrication, Tips, and Microscopy
Covers the fabrication of nanoscale MEMS devices and the operation of the Atomic Force Microscope for measuring ultrasmall forces on particles.
MEGAFLYNOVA XL
Explains the working principle and design process of the Mega-Fly-Nova XL toy.