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Laurent Fabien Hubert Sansonnens

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Laurent Fabien Hubert Sansonnens

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Probe measurements of plasma potential nonuniformity due to edge asymmetry in large-area radio-frequency reactors: The telegraph effect

Probe measurements of plasma potential nonuniformity due to edge asymmetry in large-area radio-frequency reactors: the telegraph effect

Uniformity study in large-area showerhead reactors

Calculation of the electrode shape for suppression of the standing wave effect in large area rectangular capacitively coupled reactors

Nonuniform radio-frequency plasma potential due to edge asymmetry in large-area radio-frequency reactors

Improving plasma uniformity using lens-shaped electrodes in a large area very high frequency reactor

Shaped electrode and lens for a uniform radio-frequency capacitive plasma

Development of a numerical simulation tool to study uniformity of large area PECVD film processing

Attachment-induced ionization instability in electronegative capacitive RF discharges

Glow discharge processing in the liquid crystal display industry