Publications by Paul Muralt | EPFL Graph Search

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Material Constants Extraction For Alscn Thin Films Using A Dual Mode Baw Resonator

Characterization methodology for lead zirconate titanate thin films with interdigitated electrode structures

Effective SAW excitation on non-piezoelectric substrate using AlScN piezoelectric thin film BAW/SAW hybrid transducer

A concept of wireless and passive very-high temperature sensor

Sputter Deposition Technology For Al((1-X))Sc(X)N Films With High Sc Concentration

Which is the best thin film piezoelectric material?

Domain Pinning: Comparison of Hafnia and PZT Based Ferroelectrics

Enhanced piezoelectric properties of c-axis textured aluminium scandium nitride thin films with high scandium content: influence of intrinsic stress and sputtering parameters

Ex-situ AlN seed layer for (0001)-textured Al0.84Sc0.16N thin films grown on SiO2 substrates

Micro-solid state energy conversion membranes: influence of doping and strain on oxygen ion transport and near order for electrolytes