Publications by Paul Muralt | EPFL Graph Search

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Material Parameter Extraction for Complex AlScN Thin Film Using Dual Mode Resonators in Combination with Advanced Microstructural Analysis and Finite Element Modeling

Abnormal Grain Growth in AlScN Thin Films Induced by Complexion Formation at Crystallite Interfaces

Effect of AlN seed layer on crystallographic characterization of piezoelectric AlN

Free standing and solidly mounted Lamb wave resonators based on Al0.85Sc0.15N thin film

Non-destructive piezoelectric characterisation of Sc doped aluminium nitride thin films at wafer level

Vibration Mode of MEMS Ultrasonic Sensors on Buckled Diaphragms with Piezoelectric Resonance Frequency Modification

Al0.83Sc0.17N Contour-Mode Resonators With Electromechanical Coupling in Excess of 4.5%

Growth, Properties, and Applications of Al1-xScxN Thin Films

Transient Negative Capacitance of Silicon-doped HfO2 in MFMIS and MFIS structures: experimental insights for hysteresis-free steep slope NC FETs

Determination of elastic and piezoelectric properties of Al0.84Sc0.16N thin films