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Evgeny Milyutin

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Related publications (6)

Please note that this is not a complete list of this person’s publications. It includes only semantically relevant works. For a full list, please refer to Infoscience.

Sputtering of (001)AlN thin films: Control of polarity by a seed layer

Jürgen Brugger, Nicolas Grandjean, Paul Muralt, Jean-François Carlin, Andreea Veronica Savu, Denis Martin, Scott Harada, Evgeny Milyutin

The authors report on the ability to control the polarity of sputter deposited AlN001 thin ﬁlms using seed layers. Reactive sputter deposition leads to N-polarity on any substrate hitherto applied, i.e., Si111, sapphire, SiO2, and polycrystalline metals su ...

American Vacuum Society2010

Electromechanical properties of Al0.9Sc0.1N thin films evaluated at 2.5 GHz film bulk acoustic resonators

Paul Muralt, Evgeny Milyutin, Ramin Matloub Aghdam, Silviu Cosmin Sandu, Alvaro Artieda

AlN films are employed in RF filters for wireless communication. We report on enhanced coupling factors k(t)(2) obtained by partial substitution of Al by Sc. Al0.88Sc0.12N films were deposited by reactive magnetron sputtering from an Al0.9Sc0.1 alloy targe ...

AIP American Institute of Physics2011

Theoretical and Experimental Study of Piezoelectric Modulated AlN Thin Films for Shear Mode BAW Resonators

Evgeny Milyutin

The use of acoustic resonators for sensors application has opened a new branch in research and applications of piezoelectric materials and devices. The first generation of such sensors is constituted by the quartz crystal microbalance (QCM) based on AT-cut ...

EPFL2011