Publication

Micro- and nano-patterning using local deposition through miniaturized shadow mask

Jürgen Brugger
2003
Conference paper

Abstract

not available

Official source

https://infoscience.epfl.ch/record/102383?ln=en

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Micro- and nano-patterning using local deposition through miniaturized shadow mask

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Stencil lithography

Emerging Nanopatterning Methods based on MEMS Technology

Advancing towards well-controlled full-wafer nanostencil lithography

Stencil lithography

Emerging Nanopatterning Methods based on MEMS Technology

Advancing towards well-controlled full-wafer nanostencil lithography