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Mechanical stabilisation and design optimisation of masks for stencil lithography: Numerical approach and experimental validation

Related concepts (25)
Deformation (physics)
In physics and continuum mechanics, deformation is the transformation of a body from a reference configuration to a current configuration. A configuration is a set containing the positions of all particles of the body. A deformation can occur because of external loads, intrinsic activity (e.g. muscle contraction), body forces (such as gravity or electromagnetic forces), or changes in temperature, moisture content, or chemical reactions, etc. Strain is related to deformation in terms of relative displacement of particles in the body that excludes rigid-body motions.
Design
A design is a concept of either an object, a process, or a system that is specific and, in most cases, detailed. Design refers to something that is or has been intentionally created by a thinking agent, though it is sometimes used to refer to the nature of something. The verb to design expresses the process of developing a design. In some cases, the direct construction of an object without an explicit prior plan may also be considered to be a design (such as in some artwork and craftwork).
Extreme ultraviolet lithography
Extreme ultraviolet lithography (also known as EUV or EUVL) is an optical lithography technology used in semiconductor device fabrication to make integrated circuits (ICs). It uses extreme ultraviolet (EUV) wavelengths near 13.5 nm, using a laser-pulsed tin (Sn) droplet plasma (Sn ions in the ionic states from Sn IX to Sn XIV give photon emission spectral peaks around 13.5 nm from 4p64dn - 4p54dn+1 + 4dn-14f ionic state transitions.), to produce a pattern by using a reflective photomask to expose a substrate covered by photoresist.
Web design
Web design encompasses many different skills and disciplines in the production and maintenance of websites. The different areas of web design include web graphic design; user interface design (UI design); authoring, including standardised code and proprietary software; user experience design (UX design); and search engine optimization. Often many individuals will work in teams covering different aspects of the design process, although some designers will cover them all.
Deformation (engineering)
In engineering, deformation refers to the change in size or shape of an object. Displacements are the absolute change in position of a point on the object. Deflection is the relative change in external displacements on an object. Strain is the relative internal change in shape of an infinitesimally small cube of material and can be expressed as a non-dimensional change in length or angle of distortion of the cube. Strains are related to the forces acting on the cube, which are known as stress, by a stress-strain curve.
Actuator
An actuator is a component of a machine that is responsible for moving and controlling a mechanism or system, for example by opening a valve. In simple terms, it is a "mover". An actuator requires a control device (controlled by control signal) and a source of energy. The control signal is relatively low energy and may be electric voltage or current, pneumatic, or hydraulic fluid pressure, or even human power. Its main energy source may be an electric current, hydraulic pressure, or pneumatic pressure.
Deflection (engineering)
In structural engineering, deflection is the degree to which a part of a structural element is displaced under a load (because it deforms). It may refer to an angle or a distance. The deflection distance of a member under a load can be calculated by integrating the function that mathematically describes the slope of the deflected shape of the member under that load. Standard formulas exist for the deflection of common beam configurations and load cases at discrete locations.
Design for X
Design for excellence (DfX or DFX) is a term and abbreviation used interchangeably in the existing literature, where the X in design for X is a variable which can have one of many possible values. In many fields (e.g., very-large-scale integration (VLSI) and nanoelectronics) X may represent several traits or features including: manufacturability, power, variability, cost, yield, or reliability. This gives rise to the terms design for manufacturability (DfM, DFM), design for inspection (DFI), design for variability (DfV), design for cost (DfC).
Extended Validation Certificate
An Extended Validation Certificate (EV) is a certificate conforming to X.509 that proves the legal entity of the owner and is signed by a certificate authority key that can issue EV certificates. EV certificates can be used in the same manner as any other X.509 certificates, including securing web communications with HTTPS and signing software and documents. Unlike domain-validated certificates and organization-validation certificates, EV certificates can be issued only by a subset of certificate authorities (CAs) and require verification of the requesting entity's legal identity before certificate issuance.
Rotary actuator
A rotary actuator is an actuator that produces a rotary motion or torque. The simplest actuator is purely mechanical, where linear motion in one direction gives rise to rotation. The most common actuators are electrically powered; others may be powered pneumatically or hydraulically, or use energy stored in springs. The motion produced by an actuator may be either continuous rotation, as for an electric motor, or movement to a fixed angular position as for servomotors and stepper motors.

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