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Improved design of a silicon micromachined gyroscope with piezoresistive detection and electromagnetic excitation

Related publications (40)

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An Ultralow-Power Triaxial MEMS Accelerometer With High-Voltage Biasing and Electrostatic Mismatch Compensation

Kyojin Choo, Li Xu, Yimai Peng

This article presents a triaxial micro electromechani-cal system (MEMS) capacitive accelerometer using a high-voltage biasing technique to achieve high resolution with ultralow power. The accelerometer system generates a differential pair of high voltages ...

Piscataway2024

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Microelectromechanical system (MEMS) devices, such as accelerometers, are widely used across industries, including the automotive, consumer electronics, and medical industries. MEMS are efficiently produced at very high volumes using large-scale semiconduc ...

SPRINGERNATURE2022

Electromagnetic forces in the time domain

Olivier Martin, Karim Achouri, Andrei Kiselev

We look beyond the standard time-average approach and investigate optical forces in the time domain. The formalism is developed for both the Abraham and Minkowski momenta, which appear to converge in the time domain. We unveil an extremely rich - and by fa ...

Optica Publishing Group2022

Accelerometers are widely used in industrial applications and consumer electronics. We can find them in automotive crash detection or fitness trackers. The majority are based on piezoresistive or capacitive effect which are limited by their large size. Thi ...

2020

Fabrication and Characterization of MEMS Piezoelectric Accelerometers

Myriam Yvonne Käppeli

In this master thesis, the use of MEMS technology to miniaturize existing accelerometers used for vibration sensing is demonstrated. An updated process flow was established and carried out in the cleanrooms. MEMS piezoelectric accelerometers were fabricate ...

2020

Arbitrarily high time bandwidth performance in a nonreciprocal optical resonator with broken time invariance

Camille Sophie Brès, Hatice Altug, Davide Grassani, Ivan Cardea, Kosmas Tsakmakidis, Simon Julien Fabbri

Most present-day resonant systems, throughout physics and engineering, are characterized by a strict time-reversal symmetry between the rates of energy coupled in and out of the system, which leads to a trade-off between how long a wave can be stored in th ...

2020

This master thesis presents a detailed overview of various MEMS accelerometers used as vibrometers in harsh environments. Commercial and scientific literature accelerometers are compared to determine the best accelerometer for said application. This compar ...

2019

Dielectric Actuation Techniques at the Nanoscale: Piezoelectricity and Flexoelectricity

Kaitlin Marie Howell

Micro- and nanoelectromechanical systems (MEMS/NEMS) have long shown their potential to disrupt the established technologies. Over the past 15 years, MEMS have become fundamental components in filters, accelerometers, gyroscopes and gas sensors. MEMS are n ...

EPFL2019

Construction of dynamically-dependent stochastic error models, 2018 IEEE/ION Position, Location and Navigation Symposium (PLANS)

Jan Skaloud, Stéphane Guerrier, Philipp Clausen

Stochastic behavior of an instrument is often analyzed by constructing the Allan (or wavelet) variance signatures from an error signal. For inertial sensors, such a signature is conveniently obtained by recording data at rest. The analysis of this signal w ...

IEEE ION PLANS2018

Construction of dynamically-dependent stochastic error models

Jan Skaloud, Stéphane Guerrier, Philipp Clausen

2018