Electrical breakdown at low pressure for planar microelectromechanical systems with 10- to 500-micron gaps
Related publications (36)
Graph Chatbot
Chat with Graph Search
Ask any question about EPFL courses, lectures, exercises, research, news, etc. or try the example questions below.
DISCLAIMER: The Graph Chatbot is not programmed to provide explicit or categorical answers to your questions. Rather, it transforms your questions into API requests that are distributed across the various IT services officially administered by EPFL. Its purpose is solely to collect and recommend relevant references to content that you can explore to help you answer your questions.
A semiconductor device for measuring ultra low currents down to the level of single electrons or low voltages comprises a first and a second voltage supply terminal (1, 2), an input terminal (3) for receiving an electrical current or being supplied with a ...
We present an experimental study of the DC breakdown voltage of MEMS interdigitated aluminum electrodes with gaps ranging from 10 to 500 µm. Unlike most research on MEMS electrodes, that was done at atmospheric pressure, our work has focused on the effect ...
An ultra low power 8-bit current-mode successive approximation (SAR) analog-to-digital (ADC) converter for Wireless Sensor Network (WSN) applications is presented. The proposed ADC contains a new asynchronous clock generator, which works only during data p ...
Hybrid integration and especially the packaging of microelectromechanical systems (i.e. MEMS) cannot rely on standardised packaging solutions due to the diversity of microsystems. As an example, the packaging requirements of a pressure sensor are different ...
Institut de Microtechnique, Université de Neuchâtel2009
In many of today’s system-on-chip (SoC) designs, the cores are partitioned into multiple voltage and frequency islands (VFIs), and the global interconnect is implemented using a packetswitched network on chip (NoC). In such VFI-based designs, the benefits ...
Institute of Electrical and Electronics Engineers2010
In this paper, we present miniaturized polydimethyl- siloxane (PDMS)-based diaphragm dielectric elastomer actuators capable of out-of-plane displacement up to 25% of their diameter. This very large percentage displacement is made possible by the use of com ...
Institute of Electrical and Electronics Engineers2009
In this paper, we have designed a bistable microelectromechanical switch for an implantable lead electrode multiplexer application. Fabrication is based on a single mask process. State changes require an 18 V pulse to the actuators consuming only 0.2 nJ en ...
We present an experimental study of the DC breakdown voltage of MEMS interdigitated aluminum electrodes with gaps ranging from 10 to 500 μm. Unlike most research on MEMS electrodes that was done at atmospheric pressure, our work has focused on the effect o ...
Novel extended tetrahedral forms Of CO2 have been synthesized recently under high-pressure conditions. We perform ab initio density functional theory calculations to investigate whether doping with Si can extend the stability range of such tetrahedral form ...