Publication

Low-cost LTCC-based sensors for low force ranges

Related publications (32)

Piezoresistive AFM cantilevers surpassing standard optical beam deflection in low noise topography imaging

Georg Fantner, Jonathan David Adams, Maja Dukic Pjanic

Optical beam deflection (OBD) is the most prevalent method for measuring cantilever deflections in atomic force microscopy (AFM), mainly due to its excellent noise performance. In contrast, piezoresistive strain-sensing techniques provide benefits over OBD ...

2015

Fast on-wafer electrical, mechanical, and electromechanical characterization of piezoresistive cantilever force sensors

Luis Guillermo Villanueva Torrijo

Validation of a technological process requires an intensive characterization of the performance of the resulting devices, circuits, or systems. The technology for the fabrication of micro and nanoelectromechanical systems (MEMS and NEMS) is evolving rapidl ...

2012

A novel high-throughput on-wafer electromechanical sensitivity characterization system for piezoresistive cantilevers

Luis Guillermo Villanueva Torrijo

In this work we present the development of a new set-up that allows on-wafer sensitivity characterization of piezoresistive cantilevers. In this way we reduce considerably the testing time compared to the techniques available up to date but at the same tim ...

2012

Stress-Induced Variations in the Stiffness of Micro- and Nanocantilever Beams

Luis Guillermo Villanueva Torrijo

The effect of surface stress on the stiffness of cantilever beams remains an outstanding problem in the physical sciences. While numerous experimental studies report significant stiffness change due to surface stress, theoretical predictions are unable to ...

American Physical Society2012

Sharp High-Aspect-Ratio AFM Tips Fabricated by a Combination of Deep Reactive Ion Etching and Focused Ion Beam Techniques

Luis Guillermo Villanueva Torrijo

The shape and dimensions of an atomic force microscope tip are crucial factors to obtain high resolution images at the nanoscale. When measuring samples with narrow trenches, inclined sidewalls near 90 or nanoscaled structures, standard silicon atomic forc ...

2010

A nano-tensile testing system for studying nanostructures inside an electron microscope

Dongfeng Zhang

Mechanical properties of nanostructures could be remarkably different from their bulk counterparts owing to scale effects, which have attracted considerable research interest in recent years. However, nanomechanics studies are hindered by the difficulties ...

EPFL2010

SMD pressure and flow sensor for compressed air in LTCC technology with integrated electronics

Peter Ryser, Thomas Maeder, Yannick Sébastien Fournier, Nicolas Craquelin, Grégoire Boutinard Rouelle

We have designed and fabricated a low-range (ca. 100 mN) thick-film piezoresistive force sensor with a cantilever beam fabricated in LTCC (Low Temperature Co-fired Ceramic). The beam was soldered onto a standard thick-film 25.4 x 12.7 mm signal conditionin ...

Elsevier2009

DMCMN: In Depth Characterization and Control of AFM Cantilevers With Integrated Sensing and Actuation

Georg Fantner

New developments in MEMS (microelectromechanical systems) fabrication allowed the development of new types of atomic force microscopy (AFM) sensor with integrated readout circuit and actuator built in on the cantilever. Such a fully instrumented cantilever ...

2009

Use of self-actuating and self-sensing cantilevers for imaging biological samples in fluid

Georg Fantner

In this paper, we present a detailed investigation into the suitability of atomic force microscopy (AFM) cantilevers with integrated deflection sensor and micro-actuator for imaging of soft biological samples in fluid. The Si cantilevers are actuated using ...

2009

Focused electron- and ion-beam induced processes

Vinzenz Friedli

Focused electron- and ion-beam induced processing are well established techniques for local deposition and etching that rely on decomposition of precursor molecules by irradiation. These high-resolution nanostructuring techniques have various applications ...

EPFL2008

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