Electronic properties of an epitaxial silicon oxynitride layer on a 6H-SiC(0001) surface: A first-principles investigation

Using a density functional scheme, the authors investigate the electronic properties of an epitaxial silicon oxynitride layer on a 6H-SiC(0001) surface, as recently realized experimentally. Simulated scanning-tunneling-microscopy images of filled and empty states agree well with the experiment, lending support to the proposed atomic structure. In accord with the experiment, the local density of states indicates that the electronic band gap in the thin silicate layer at the surface is close to that of bulk SiO2. The authors show that this effect results from the surface of the epitaxial adlayer acting as a high-barrier potential for the SiC states induced in the oxide band gap.

Structural and electronic properties of an abrupt 4H-SiC(0001)/SiO2 interface model: Classical molecular dynamics simulations and density functional calculations

Peter Broqvist, Fabien Devynck, Alfredo Pasquarello

Using a density functional approach, we study structural and electronic properties of the 4H(0001)-SiC/SiO2 interface. Through the sequential use of classical and ab initio simulation methods, we generate an abrupt model structure which describes the transition between crystalline SiC and amorphous SiO2 without showing any coordination defect. The first step in our generation procedure consists in identifying suitable interfacial bonding patterns which account for the bond density reduction across the interface. In the second step, the connection to amorphous SiO2 is achieved through classical molecular dynamics. The atomic positions are then relaxed within a generalized gradient approximation of density functional theory. The final model structure shows good structural parameters and an oxide density typical of amorphous SiO2. We investigate the electronic structure of the generated model interface through the local density of states obtained with hybrid density functionals. In our atomically abrupt interface model, the full oxide band gap is recovered at a distance of similar to 5 A from the interface. This extent is in good agreement with estimates derived from internal photoemission measurements and provides support for the abrupt nature of the interface. We obtained band offsets through two different procedures: by evaluating the local density of states and by aligning the band extrema through the local electrostatic potential. Band offsets calculated with various functionals are compared to experimental values. The best agreement is achieved for a hybrid functional in which a screened Coulomb potential is used in the Hartree-Fock exchange term. For this case, the calculated band offsets underestimate the experimental values by similar to 25%, but agree with experiment within a few percent when expressed with respect to the oxide band gap.

2007

First-principles study of defects at the SiC/SiO2 interface through hybrid functionals

Fabien Devynck

The requirements of present high-performance power electronic systems are exceeding the power density, efficiency, and reliability of silicon-based devices. Silicon carbide (SiC) is a candidate of choice for high-temperature, high-speed, high-frequency, and high-power applications: it has a wide band gap, high thermal conductivity, high saturated electron drift velocity, and high breakdown electric field. SiC is also hard, chemically stable, and resistant to radiation damage. Despite these desirable electronic properties, SiC-based devices are still facing many performance challenges due to the high density of defect states at the SiC/SiO2 interface. This thesis is dedicated to the first-principles study of defects at the SiC/SiO2 interface through hybrid functionals. We first generate a model structure providing a realistic description of the majority bonding arrangements at the 4H(0001)-SiC/SiO2 interface. The description of the electronic structure of the model through hybrid functionals leads to band offsets in excellent agreement with their experimental counterparts. We then study several semiconductor and oxide defects using spin-polarized hybrid density functionals and identify candidate defects responsible for the high density of interface defects measured in the 4H-SiC band gap. Finally, the possibility of growing epitaxial silicate adlayers on SiC is investigated as an alternative approach to greatly reduce the high density of defect states at the SiC/SiO2 interface.

EPFL2008

Ab initio study of interface states at metal contacts to III-IV semiconductors

Thomas Maxisch

We present a theoretical study of the physical characteristics of metal/semiconductor junctions. Using first principle pseudopotential calculations, we have investigated the nature of electronic states with energies within the semiconductor band gap of representative abrupt, defect-free, anion-terminated metal/III-V interfaces. Namely, we focused on Al contacts to GaAs(001), AlAs(001) and cubic GaN(001) as well as on Al, Au and Cu junctions to cubic GaN(001). Recent advances in Schottky barrier concepts emphasize the possible relationship between interface states and the formation of the Schottky barrier. We aim at understanding the atomic-scale mechanisms responsible for interface states as well as their role in the Schottky barrier formation process. At As-terminated Al/GaAs(001) and Al/AlAs(001) junctions, resonant and localized interface states occur at the J point of the interface 2D Brillouin zone near the Fermi energy in the semiconductor midgap region. They correspond to intermetallic bonds between the outermost cation atoms of the semiconductor and the interfacial Al atoms of the metal. These interface states derive from an interaction between localized states of the Al(001) surface and semiconductor conduction band states, mediated by localized states of the unreconstructed, As-terminated semiconductor (001) surface. Our results indicate that interface states of the intermetallic, bonding-like kind could play an important role in the transport properties of metal/AlxGa1-xAs junctions. We have also investigated the electronic structure of Al, Au and Cu junctions to cubic, N-terminated GaN(001). The localized interface state reported for As-terminated Al/GaAs(001) and Al/AlAs(001) junctions occurs also at metal/GaN interfaces under the condition that atoms on the outermost atomic plane of the metal are placed in front of the outermost semiconductor cation. This indicates that the formation mechanism of this state is a very general one. In contrast to Al/AlxGa1-xAs junctions, these states occur at energy much larger than EF for the contacts to GaN. Thus, they are not expected to contribute significantly to the electronic transport of the latter interfaces. However, a large number of interface states attributed to d-type orbitals occur over a wide energy range including EF at contacts of noble metals to GaN.