Development of stencil lithography for nanopatterning and for electronic and biosensing applications
Graph Chatbot
Chat with Graph Search
Ask any question about EPFL courses, lectures, exercises, research, news, etc. or try the example questions below.
DISCLAIMER: The Graph Chatbot is not programmed to provide explicit or categorical answers to your questions. Rather, it transforms your questions into API requests that are distributed across the various IT services officially administered by EPFL. Its purpose is solely to collect and recommend relevant references to content that you can explore to help you answer your questions.
Nanowire superconducting single photon detectors (SSPDs) [1] are characterized by very high sensitivity in the near infrared (detection efficiency η up to 30%, for a dark count rate DK of few Hz), speed (up to ∼1 GHz repetition rate) and time resolution (j ...
The TAE antenna system on JET is used to drive intermediate and high n Alfvén Eigenmodes (AEs) into the plasma so as to study their properties and estimate their stability by measuring their damping rates as a function of the various plasma parameters. In ...
The vacuum deposition of complex functional molecules and nanoparticles by thermal sublimation is often hindered due to their extremely low vapor pressure. This especially impedes the application of ultrahigh vacuum (UHV) based analytical and surface modif ...
WC/amorphous carbon (a-C) thin films were deposited by dual magnetron sputtering from individual WC and graphite targets. The influence of film composition and microstructure on the optical and electrical properties was investigated. As evidenced by x-ray ...
We study the coupling of localized surface plasmon (LSP) and surface-plasmon polariton (SPP) modes in a system composed of a metallic nanoparticle chain separated from a thin metallic film by a dielectric spacer. The thickness of such a spacer influences t ...
Al2O3 thin films were deposited by a metal organic chemical vapour deposition on InAIN/GaN heterostructures using Ar or NH3 as a carrier gas. Effects of NH3 and Ar carrier gases on the electrical and structural properties of Al2O3/InAIN/GaN HEMT devices we ...
A nanoelectromechanical mass sensor is used to characterize material deposition rates in stencil lithography. The material flux through micron size apertures is mapped with high spatial (below 1 μm) and deposition rate (below 10 pm/s) resolutions by displa ...
In this paper, we report on a process to prepare gold nanoparticle stripes on SiO2 by convective/capillary assembly without any patterning of the substrate. Electrical devices were then fabricated using stencil lithography in order to avoid any contaminati ...
Neuroprostheses were developed for a variety of applications using unique microfabrication methods. A technology platform that enables novel microelectrode array designs and microfluidic channels is described. Experiments demonstrating the in vivo utility ...
This paper reports on the preparation of silver/antimony-doped tin oxide (Ag/SnO2:Sb) hybrid interfaces using magnetron sputtering and their characterization. The influence of the Sri target composition (doping with 2 or 5% Sb) on the electrochemical and e ...
