Etching (microfabrication)Etching is used in microfabrication to chemically remove layers from the surface of a wafer during manufacturing. Etching is a critically important process module, and every wafer undergoes many etching steps before it is complete. For many etch steps, part of the wafer is protected from the etchant by a "masking" material which resists etching. In some cases, the masking material is a photoresist which has been patterned using photolithography. Other situations require a more durable mask, such as silicon nitride.
Circular polarizationIn electrodynamics, circular polarization of an electromagnetic wave is a polarization state in which, at each point, the electromagnetic field of the wave has a constant magnitude and is rotating at a constant rate in a plane perpendicular to the direction of the wave. In electrodynamics, the strength and direction of an electric field is defined by its electric field vector. In the case of a circularly polarized wave, the tip of the electric field vector, at a given point in space, relates to the phase of the light as it travels through time and space.
Polarization (physics)Polarization (also polarisation) is a property of transverse waves which specifies the geometrical orientation of the oscillations. In a transverse wave, the direction of the oscillation is perpendicular to the direction of motion of the wave. A simple example of a polarized transverse wave is vibrations traveling along a taut string (see image); for example, in a musical instrument like a guitar string. Depending on how the string is plucked, the vibrations can be in a vertical direction, horizontal direction, or at any angle perpendicular to the string.
PolarizerA polarizer or polariser (see spelling differences) is an optical filter that lets light waves of a specific polarization pass through while blocking light waves of other polarizations. It can filter a beam of light of undefined or mixed polarization into a beam of well-defined polarization, that is polarized light. The common types of polarizers are linear polarizers and circular polarizers. Polarizers are used in many optical techniques and instruments, and polarizing filters find applications in photography and LCD technology.
Polarization rotatorA polarization rotator is an optical device that rotates the polarization axis of a linearly polarized light beam by an angle of choice. Such devices can be based on the Faraday effect, on birefringence, or on total internal reflection. Rotators of linearly polarized light have found widespread applications in modern optics since laser beams tend to be linearly polarized and it is often necessary to rotate the original polarization to its orthogonal alternative. Faraday rotator A Faraday rotator consists of an optical material in a magnetic field.
Plasma etchingPlasma etching is a form of plasma processing used to fabricate integrated circuits. It involves a high-speed stream of glow discharge (plasma) of an appropriate gas mixture being shot (in pulses) at a sample. The plasma source, known as etch species, can be either charged (ions) or neutral (atoms and radicals). During the process, the plasma generates volatile etch products at room temperature from the chemical reactions between the elements of the material etched and the reactive species generated by the plasma.
Reactive-ion etchingReactive-ion etching (RIE) is an etching technology used in microfabrication. RIE is a type of dry etching which has different characteristics than wet etching. RIE uses chemically reactive plasma to remove material deposited on wafers. The plasma is generated under low pressure (vacuum) by an electromagnetic field. High-energy ions from the plasma attack the wafer surface and react with it. A typical (parallel plate) RIE system consists of a cylindrical vacuum chamber, with a wafer platter situated in the bottom portion of the chamber.
Plane of incidenceIn describing reflection and refraction in optics, the plane of incidence (also called the incidence plane or the meridional plane) is the plane which contains the surface normal and the propagation vector of the incoming radiation. (In wave optics, the latter is the k-vector, or wavevector, of the incoming wave.) When reflection is specular, as it is for a mirror or other shiny surface, the reflected ray also lies in the plane of incidence; when refraction also occurs, the refracted ray lies in the same plane.
Fresnel equationsThe Fresnel equations (or Fresnel coefficients) describe the reflection and transmission of light (or electromagnetic radiation in general) when incident on an interface between different optical media. They were deduced by Augustin-Jean Fresnel (freɪˈnɛl) who was the first to understand that light is a transverse wave, even though no one realized that the "vibrations" of the wave were electric and magnetic fields.
Photon polarizationPhoton polarization is the quantum mechanical description of the classical polarized sinusoidal plane electromagnetic wave. An individual photon can be described as having right or left circular polarization, or a superposition of the two. Equivalently, a photon can be described as having horizontal or vertical linear polarization, or a superposition of the two. The description of photon polarization contains many of the physical concepts and much of the mathematical machinery of more involved quantum descriptions, such as the quantum mechanics of an electron in a potential well.
