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Reliability of rf mems capacitive switches and distributed mems phase shifters using aln dielectric

Related publications (33)

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Dielectric Elastomer Actuators (DEAs) are a type of smart material described as compliant capacitors. They show impressive performances as soft actuators, such as a high strain and fast response. Nonetheless, replicating natural muscle function with DEAs h ...

Society of Photo-Optical Instrumentation Engineers (SPIE)2024

Synthesis of polysiloxane elastomers modified with sulfonyl side groups and their electromechanical response

Holger Frauenrath, Yauhen Sheima

Dielectric elastomer transducers are elastic capacitors that respond to mechanical or electrical stress. They can be used in applications such as millimeter-sized soft robots and harvesters of the energy contained in ocean waves. The dielectric component o ...

ROYAL SOC CHEMISTRY2023

Dataset for "Low-temperature processing of screen-printed piezoelectric KNbO3 with integration onto biodegradable paper substrates"

Danick Briand, Luis Guillermo Villanueva Torrijo, Morgan Mc Kay Monroe

This data set contains the data collected during the FNS project Green Piezo (Grant no. 179064) in association with the recent publication entitled “Low-temperature processing of screen-printed piezoelectric KNbO3 with integration onto biodegradable paper ...

EPFL Infoscience2023

Recent advancements in miniature devices with higher computational capabilities and ultralow power consumption have accelerated the development of wearable sensors, actuators, and energy harvesters everywhere. The ultimate aim of such a technological revol ...

EPFL2023

Nonlinear electro-mechanical coupling and thermally stimulated currents in relaxor ferroelectrics

Lukas Riemer

In this work, the emergence of polarization and electro-mechanical coupling in Pb(Mg1/3Nb2/3)O3 and Pb(Mg1/3Nb2/3)O3 â PbTiO3 was investigated by means of thermally stimulated current, and nonlinear dielectric and electro-mechanical measurements. The pre ...

EPFL2022

DEA Self-discharge Characterization for Low Duty Cycle Applications

Yves Perriard, Yoan René Cyrille Civet, Thomas Guillaume Martinez, Stefania Maria Aliki Konstantinidi, Raphaël Johannes Charles Mottet

This publication presents the characterization of self discharging Dielectric Elastomer Actuators (DEAs) in order to give place to low duty cycle applications, during which a DEA must remain actuated for long periods of time. DEAs typically present a low c ...

IEEE2021

Micro- and nanoelectromechanical systems (MEMS/NEMS) have long shown their potential to disrupt the established technologies. Over the past 15 years, MEMS have become fundamental components in filters, accelerometers, gyroscopes and gas sensors. MEMS are n ...

EPFL2019

Electrical energy generated by silicone elastomers filled with nanospring- carbon- nanotubes

Frank Nüesch

Dielectric elastomer generators (DEGs) are flexible capacitors that convert mechanical into electrical energy. They rely on an external voltage source to charge the capacitor during each operation cycle. An alternative to this is an autonomous DEG which op ...

2019

High Force Density Textile Electrostatic Clutch

Herbert Shea, Ronan Julien Hinchet

Clutches are key elements for blocking or coupling motion in wearable systems such as soft exoskeletons, haptic clothing, and rehabilitation equipment. Electrostatic clutches (ESclutches) are compact and light, making them particularly well-suited for wear ...

WILEY2019

The recent progress in synthesis and integration of highly piezoelectric lead-zirconate-titanate (PZT) thin films onto silicon substrates are paving the way for new, more efficient and faster devices in micro electro-mechanical systems (MEMS). In compariso ...

EPFL2014