Niels Quack, Hamed Sattari, Alain Yuji Takabayashi, Göran Stemme
Silicon (Si) photonic micro-electro-mechanical systems (MEMS), with its low-power phase shifters and tunable couplers, is emerging as a promising technology for large-scale reconfigurable photonics with potential applications for example in photonic accele ...
SPIE-INT SOC OPTICAL ENGINEERING2021