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Finite element analysis and experiments on a silicon membrane actuated by an epitaxial PZT thin film for localized-mass sensing applications

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9 MHz vibrating body FET tuning fork oscillator

Mihai Adrian Ionescu, Maher Kayal, Daniel Grogg, Fabrizio Lo Conte

A 9.4MHz micro-electromechanical oscillator based on a Vibrating Body Field Effect Transistor (VB-FET) is presented in this work. The tuning fork VB-FET used in this work provides a high quality factor of 9400 in the open-loop configuration and a low equiv ...

Ieee Service Center, 445 Hoes Lane, Po Box 1331, Piscataway, Nj 08855-1331 Usa2009

The vacuum deposition of complex functional molecules and nanoparticles by thermal sublimation is often hindered due to their extremely low vapor pressure. This especially impedes the application of ultrahigh vacuum (UHV) based analytical and surface modif ...

EPFL2008

Fabrication and properties of high-Q AlN/SiO2 composite TFBAR's for above IC oscillators

Paul Muralt, Alvaro Artieda

High-Q, bulk acoustic wave composite resonators based on a symmetric layer sequence Of SiO2-A1N-SiO2 sandwiched between electrodes have been developed. Acoustic isolation was achieved by means of deep silicon etching to obtain membrane type TFBAR's. Three ...

Ieee Service Center, 445 Hoes Lane, Po Box 1331, Piscataway, Nj 08855-1331 Usa2007

Straight silicon tube for density and mass flow sensing (fabrication, modeling and evaluation)

Mohammad Najmzadeh

The aim of this project work is to fabricate and evaluate a resonating silicon tube as a density and a Coriolis-based mass flow sensor. This project consists of three course works: a project work, a microelectronics project, and a master thesis. At first, ...

2007

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Abstract—A common problem when using piezoceramic actuators for precise positioning is their hysteresis. Either external sensors such as capacitive or inductive probes, optical sensors or strain gauges are commonly used. The latter are the most favorable s ...

IEEE2002

For the development of a 1 MW, 140 GHz gyrotron for CW operation which will be installed at the stellarator facility Wendelstein 7-X at IPP Greifswald, a collaboration between different European research institutes and an industrial company has been establ ...

2001

The paper reviews different aspects of deposition, integration, and device fabrication of PbZrxTi1-xO3 (PZT) films for application in micromechanical systems. The deposition of such films and the principal processes for their integration onto silicon subst ...

1996

In-situ sputter deposition of PT and PZT films on platinum and RuO2 electrodes

Nava Setter, Paul Muralt, Thomas Maeder

The in-situ growth of PbZrxTi1-xO3 (PZT) and PbTiO3 (PT) thin films by reactive sputter deposition has been investigated for applications with silicon substrates. In-situ deposition from three simultaneously operating magnetron sources was applied. At the ...

Elsevier1995

Pb(Zr,Ti)O3 thin films by in-situ reactive sputtering on micromachined membranes for micromechanical applications

Nava Setter, Paul Muralt, Thomas Maeder

For micromechanical applications, piezoelectric PbZrTO3 (PZT) thin films have been deposited on metallised Si3N4/SiO2 layers on Si wafers. Films with compositions near the morphotropic phase boundary (x=0.53) were prepared at 600°C using a multitarget, in- ...

The Institute of Materials / Maney Publishing1995

Etude d'un gyrotron à cavité cylindrique: influence des réflexions de puissance et de l'oscillation d'un mode propageant

The quality factor and oscillating mode of a gyrotron cavity are essential parameters to consider when trying to obtain a high power (>500 kW), high efficiency (∼50%) microwave source, which oscillates in a stable manner in the principal mode of the cavity ...

EPFL1991