A new fully integrated 2D micro-fluxgate magnetometer is presented. This magnetometer is integrated in a standard CMOS process and uses a ferromagnetic core integrated on the chip by a photolithographic post process compatible to the integrated circuit technology. This core is placed diagonally above four excitation coils, two for each measurement axis. A novel electronic signal extraction technique is presented, whose realization results in a magnetic sensitivity of 160 V/T and a linear range of ± 50 μT. The magnetic equivalent noise spectral density is 70 nT/√Hz at 1 Hz, and the total power consumption is as low as 25 mW for the 5 V power supply.
Sandro Carrara, Diego Ghezzi, Gian Luca Barbruni
Danick Briand, Ryan Mitchell van Dommelen, Rubaiyet Iftekharul Haque, Jaemin Kim
David Atienza Alonso, Marina Zapater Sancho, Giovanni Ansaloni, Alexandre Sébastien Julien Levisse, Halima Najibi