Publication

Robust PECVD SiC membrane made for stencil lithography

Related publications (62)

About
Privacy
Disclaimer

Graph Chatbot

Chat with Graph Search

Ask any question about EPFL courses, lectures, exercises, research, news, etc. or try the example questions below.

DISCLAIMER: The Graph Chatbot is not programmed to provide explicit or categorical answers to your questions. Rather, it transforms your questions into API requests that are distributed across the various IT services officially administered by EPFL. Its purpose is solely to collect and recommend relevant references to content that you can explore to help you answer your questions.

Robust PECVD SiC membrane made for stencil lithography

Graph Chatbot

Chat with Graph Search

Empirical and analytical analyses of laboratory granular flows to investigate rock avalanche propagation

Effects of tensile stress on electrical parameters of thin film conductive wires fabricated on a flexible substrate using stencil lithography

Measurement of effective piezoelectric coefficients of PZT thin films for energy harvesting application with interdigitated electrodes

Residual Stress and Buckling Patterns of Free-standing Yttria-stabilized-zirconia Membranes Fabricated by Pulsed Laser Deposition

Long-term mechanical reliability of ceramic thick-film circuits and mechanical sensors under static load

Evaluation of the hydrodynamic pressure of cavitation impacts from stress-strain analysis and geometry of individual pits