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Polymer multilayer photonic micro- and nanostructures with tailored spectral properties

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UV-induced index changes in undoped fluoride glass

Theo Lasser, Hans Georg Limberger, Marcel Zeller

Undoped fluoride glass slides have been exposed to pulsed 193-nm ultraviolet (UV) irradiation. Their absorption changes have been measured to evaluate UV-induced index changes using Kramers-Kronig relation. A layer-peeling polishing technique was applied t ...

2005

High-throughput surface patterning with wafer-sized stencils fabricated by a DUV/MEMS process

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart

The endeavour to develop nanodevices demands for patterning methods in the nanometer scale. The continuous improvement in lithography methods based on deep UV (DUV), X-ray, or electron beam exposure allow for further progress in integrated circuit hardware ...

2004

Full-wafer stencils fabricated by a DUV/MEMS process for high-throughput patterning of mesoscopic structures

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart

Photoresist-based lithography has major limitations when applied to micro-electro-mechanical systems (MEMS) with mechanically fragile and/or chemically functionalised surfaces. As a remedy, alternative, complementary nanopatterning methods have been develo ...

2004

Phase shifted microcavities

Ross Stanley

An optically-active multi-layer dielectric structure comprises an optically active zone between two mirrors forming a Fabry-Perot microcavity. The optically active zone comprises an optically active material of wavelength lambda centred in a layer of high ...

2004

Glazing

Josef Andreas Schuler

GLAZING Field of the invention The present invention relates to glazings which, in particular, may be used in solar collectors. In the present text, the term "glazing" means any material, e.g. glass or polycarbonate, transparent to visible electromagnetic ...

2003

Glazing

Andreas Schueler

Field of the invention The present invention relates to glazings which, in particular, may be used in solar collectors. In the present text, the term "glazing" means any material, e.g. glass or polycarbonate, transparent to visible electromagnetic radiatio ...

2003

1D and 2D X-ray waveguides: Optics and applications

Christian David

X-ray waveguides offer a novel approach for nanobeam production, which may become useful in coherent beam imaging and phase contrast projection microscopy. Internal field enhancement, coherency properties, and coupling efficiency of these devices have been ...

2003

Beam-steering micromirrors for large optical cross-connects

Herbert Shea, Ji Hyun Kim

This paper describes Si-micromachined two-axis beam- steering micromirrors and their performance in 256 x 256- and 1024 x 1024-port large optical cross-connects (OXCs). The high-reflectivity wavelength-independent mirrors are electrostatically actuated; ca ...

2003

Tunable optical filter of porous silicon as key component for a MEMS spectrometer

Philippe Renaud, Sandra Schweizer, Gerhard Lammel

We present a microspectrometer based on a tunable interference filter for infrared or visible light that scans the desired part of the spectrum within milliseconds. A single pixel detector measures serially the intensity at selected wavelengths. This conce ...

2002

Reflection of waveguided X-rays in two-dimensional nanostructures

Christian David

The internal reflection of an excited X-ray waveguide mode in a synthetic nanostructure, defined by electron-beam lithography, has been measured. In this device, the X-ray beam is first coupled into a conventional vertical thin-film waveguide structure and ...

2002