Signal Stability of LTCC Cantilever Force Sensors

In this work, we study in detail the sensing characteristics of piezoresistive force sensors based on structured LTCC (Low Temperature Co-fired Ceramic) cantilevers carrying a thick-film piezoresistive bridge. These devices show much improved sensitivity compared to classical alumina-based devices, but may exhibit abnormally large signal and drift, which indicates the presence of structural defects originating from fabrication issues or deleterious interactions between materials. To eliminate these effects, the fabrication parameters of the LTCC cantilevers have been studied in detail. By varying materials, layer thicknesses, stacking order and lamination parameters, the respective roles of resistor-termination-tape interactions, plastic deformation of conductor tracks and lamination quality of the LTCC sheets may be elucidated.