NanolithographyNanolithography (NL) is a growing field of techniques within nanotechnology dealing with the engineering (patterning e.g. etching, depositing, writing, printing etc) of nanometer-scale structures on various materials. The modern term reflects on a design of structures built in range of 10−9 to 10−6 meters, i.e. nanometer scale. Essentially, the field is a derivative of lithography, only covering very small structures. All NL methods can be categorized into four groups: photo lithography, scanning lithography, soft lithography and other miscellaneous techniques.
Curved mirrorA curved mirror is a mirror with a curved reflecting surface. The surface may be either convex (bulging outward) or concave (recessed inward). Most curved mirrors have surfaces that are shaped like part of a sphere, but other shapes are sometimes used in optical devices. The most common non-spherical type are parabolic reflectors, found in optical devices such as reflecting telescopes that need to image distant objects, since spherical mirror systems, like spherical lenses, suffer from spherical aberration.
65 nm processThe 65 nm process is an advanced lithographic node used in volume CMOS (MOSFET) semiconductor fabrication. Printed linewidths (i.e. transistor gate lengths) can reach as low as 25 nm on a nominally 65 nm process, while the pitch between two lines may be greater than 130 nm. For comparison, cellular ribosomes are about 20 nm end-to-end. A crystal of bulk silicon has a lattice constant of 0.543 nm, so such transistors are on the order of 100 atoms across. By September 2007, Intel, AMD, IBM, UMC and Chartered were also producing 65 nm chips.
Vergence (optics)In optics, vergence is the angle formed by rays of light that are not perfectly parallel to one another. Rays that move closer to the optical axis as they propagate are said to be converging, while rays that move away from the axis are diverging. These imaginary rays are always perpendicular to the wavefront of the light, thus the vergence of the light is directly related to the radii of curvature of the wavefronts. A convex lens or concave mirror will cause parallel rays to focus, converging toward a point.
Carbon nanotubeA carbon nanotube (CNT) is a tube made of carbon with a diameter in the nanometer range (nanoscale). They are one of the allotropes of carbon. Single-walled carbon nanotubes (SWCNTs) have diameters around 0.5–2.0 nanometers, about 100,000 times smaller than the width of a human hair. They can be idealized as cutouts from a two-dimensional graphene sheet rolled up to form a hollow cylinder. Multi-walled carbon nanotubes (MWCNTs) consist of nested single-wall carbon nanotubes in a nested, tube-in-tube structure.
Airy diskIn optics, the Airy disk (or Airy disc) and Airy pattern are descriptions of the best-focused spot of light that a perfect lens with a circular aperture can make, limited by the diffraction of light. The Airy disk is of importance in physics, optics, and astronomy. The diffraction pattern resulting from a uniformly illuminated, circular aperture has a bright central region, known as the Airy disk, which together with the series of concentric rings around is called the Airy pattern. Both are named after George Biddell Airy.
Spherical aberrationIn optics, spherical aberration (SA) is a type of aberration found in optical systems that have elements with spherical surfaces. Lenses and curved mirrors are prime examples, because this shape is easier to manufacture. Light rays that strike a spherical surface off-centre are refracted or reflected more or less than those that strike close to the centre. This deviation reduces the quality of images produced by optical systems. The effect of spherical aberration was first identified by Ibn al-Haytham who discussed it in his work Kitāb al-Manāẓir.
Ball grid arrayA ball grid array (BGA) is a type of surface-mount packaging (a chip carrier) used for integrated circuits. BGA packages are used to permanently mount devices such as microprocessors. A BGA can provide more interconnection pins than can be put on a dual in-line or flat package. The whole bottom surface of the device can be used, instead of just the perimeter. The traces connecting the package's leads to the wires or balls which connect the die to package are also on average shorter than with a perimeter-only type, leading to better performance at high speeds.
Circle of confusionIn optics, a circle of confusion (CoC) is an optical spot caused by a cone of light rays from a lens not coming to a perfect focus when imaging a point source. It is also known as disk of confusion, circle of indistinctness, blur circle, or blur spot. In photography, the circle of confusion is used to determine the depth of field, the part of an image that is acceptably sharp. A standard value of CoC is often associated with each image format, but the most appropriate value depends on visual acuity, viewing conditions, and the amount of enlargement.
GrapheneGraphene (ˈgræfiːn) is an allotrope of carbon consisting of a single layer of atoms arranged in a hexagonal lattice nanostructure. The name is derived from "graphite" and the suffix -ene, reflecting the fact that the graphite allotrope of carbon contains numerous double bonds. Each atom in a graphene sheet is connected to its three nearest neighbors by σ-bonds and a delocalised π-bond, which contributes to a valence band that extends over the whole sheet.
