Analysis of local deformation effects in resistive strain sensing of a submicron-thickness AFM cantilever
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Abstract—A common problem when using piezoceramic actuators for precise positioning is their hysteresis. Either external sensors such as capacitive or inductive probes, optical sensors or strain gauges are commonly used. The latter are the most favorable s ...
Two simple low-cost thick-film force sensor designs are optimised, characterised and tested in this work, combining calculations of sensor element and joint stresses, joint strength characterisation and measurement of complete sensors. All sensors are base ...
This paper reports on the design, fabrication, and characterization of the first low-power consumption MOSFET gas sensor. The novel MOSFET array gas sensor has been fabricated using anisotropic bulk silicon micromachining. A heating resistor, a diode used ...
This work presents calculations and measurements on a novel low-cost thick-film force sensor design for the 100 N force range. The mechanical concept of these force sensors is based on a double ring biaxial load, which allows the fabrication of simple sens ...
