Publication

Effects of Si and Y in structural development of (Al,Cr,Si/Y)OxN1 (-) (x) thin films deposited by magnetron sputtering

Related publications (35)

About
Privacy
Disclaimer

Graph Chatbot

Chat with Graph Search

Ask any question about EPFL courses, lectures, exercises, research, news, etc. or try the example questions below.

DISCLAIMER: The Graph Chatbot is not programmed to provide explicit or categorical answers to your questions. Rather, it transforms your questions into API requests that are distributed across the various IT services officially administered by EPFL. Its purpose is solely to collect and recommend relevant references to content that you can explore to help you answer your questions.

Effects of Si and Y in structural development of (Al,Cr,Si/Y)OxN1 (-) (x) thin films deposited by magnetron sputtering

Graph Chatbot

Chat with Graph Search

Sputtered titanium oxynitride coatings for endosseous applications: Physical and chemical evaluation and first bioactivity assays

Formation of cubic structured (Al1-xCrx)(2+delta)O-3 and its dynamic transition to corundum phase during cathodic arc evaporation

High vacuum chemical vapour deposition of oxides: A review of technique development and precursor selection

Thermal Boundary Conductance between metals and dielectrics

Growth and Magnetism of Nanostructures Investigated by STM, MOKE, and XMCD

Electrospray Ion Beam Deposition of Complex Non-Volatile Molecules

Formation Mechanisms and Structural Properties of Aluminium-Chromium Based Oxynitride Thin Films Synthesized by Physical Vapor Deposition

Off-Axis Texture and Crystallographic Accommodation in Multicomponent Nitride Thin Films Deposited by Pulsed Magnetron Sputtering

Material Study of Micromachined Thin Film Solid Oxide Fuel Cells

Biaxial texture development in aluminum nitride layers during off-axis sputter deposition