Measurement of nanograin orientations: Application to Cu interconnects
Related publications (43)
Graph Chatbot
Chat with Graph Search
Ask any question about EPFL courses, lectures, exercises, research, news, etc. or try the example questions below.
DISCLAIMER: The Graph Chatbot is not programmed to provide explicit or categorical answers to your questions. Rather, it transforms your questions into API requests that are distributed across the various IT services officially administered by EPFL. Its purpose is solely to collect and recommend relevant references to content that you can explore to help you answer your questions.
The integration of ultrafast laser systems with transmission electron microscopes led to the extension of conventional electron microscopy (PINEM) to the 4th dimension, time, and new techniques as photon-induced near-field electron microscopy became availa ...
Carbon nanotubes with unique physical and mechanical properties have shown great potential for biological applications, including tissue engineering and mimicking the structure and properties of human bones. In the present work, sol-gel synthesized nanocom ...
In this work, the effects of vanadium addition in the range of 0.3-3% (in weight percent) for an oxide dispersion strengthened reduced activation ferritic (ODS RAF) steel were investigated. Samples of the V-modified steel have been prepared using elemental ...
Until now, only two intrinsically two-dimensional materials have been isolated: graphene and boron nitride (BN). As a consequence, the knowledge of two-dimensional systems is still limited and other classes of two-dimensional materials are needed to enrich ...
The stochastic nature of biological systems makes the study of individual cells a necessity in systems biology. Yet, handling and disruption of single cells and the analysis of the relatively low concentrations of their protein components still challenges ...
The CLIC Test Facility 3 (CTF3) drive beam injector should provide high intensity and high quality electron beams. The present installation relies on a thermionic gun followed by a complexRF bunching system. As an upgrade to improve the beam emittance and ...
This work presents a study of XRD measurements on the development of the (113) preferential orientation with film thickness for Ti0.67Al0.33N films grown on Si(100) substrates by pulsed DC magnetron sputtering. The buildup of (113) texture was observed usi ...
An in situ annealing stage has been developed in-house and integrated in the chamber of a Scanning Electron Microscope equipped with an Electron BackScattered Diffraction system. Based on the Joule effect, this device can reach the temperature of 1200°C at ...
A W-2Y(2)O(3) composite has been developed by powder metallurgy methods in collaboration with the Plansee Company (Austria). The microstructure of the composite was analyzed using transmission electron microscopy and electron backscatter diffraction in sca ...
We report on an annealing-induced "gate sinking" effect in a 2-nm-thin In0.17Al0.83N/AlN barrier high electron mobility transistor with Ir gate. Investigations by transmission electron microscopy linked the effect to an oxygen containing interlayer between ...