Structure and electronic properties of AlCrOxN1-x thin films deposited by reactive magnetron sputtering
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The main objectives of this work are 2-fold : The development of a novel type of composite material based on carbon nanofibers supported on sintered metal fibers filters (CNF/SMF) and to explore the use of this material as a catalytic support for a model r ...
Due to their high hardness, high melting point and high chemical stability, transition metal nitrides present a great interest for various applications. This work constitutes a contribution to the understanding of the properties of Nb based binary and tern ...
By addition of Si to a binary transition metal nitride MN (e.g. TiN, ZrN, NbN, CrN), the hardness, thermal stability and chemical inertness of films have been considerably improved. The formation of a ternary M–Si–N ternary phase is possible under specific ...
(001)-textured AIN thin films as needed for longitudinal bulk acoustic wave (BAW) devices exhibit large mechanical stress variations and large orientation variation as a function of growth substrate properties. We prepared thin silicon and silicon dioxide ...
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Aluminum rich oxynitride thin films were prepared using pulsed direct current (DC) magnetron sputtering from an Al95.5Cr2.5Si2 (at.%) target. Two series of films were deposited at 400 degrees C and 650 degrees C by changing the O-2/(O-2 + N-2) ratio in the ...
Tungsten-iron alloy was produced by electrodeposition. The electrodeposited alloy (15 at.% W) possesses a two-phase composite microstructure, containing a nanocrystalline phase of distorted BCC structure with a grain size between 50 to 150 nm and an amorph ...
Thin films of tantalum oxynitride were prepared by reactive magnetron sputtering using a Ta target and N2 and O2 as reactive gases. The nitrogen flow was kept constant while the oxygen flow was pulsed periodically. The film composition evolves progressivel ...
Strontium barium niobate (SrxBa1-xNb2O6, shortly SBN) is a solid solution system with tetragonal tungsten bronze crystal structure. It exhibits a ferroelectric phase with only one polar axis and a transition temperature depending on the Sr/Ba ratio. This t ...
EPFL2005
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e report an investigation concerning the influence of ion bombardment on the nanostructure and physical properties of Zr–Si–N nanocomposite thin films. The films were deposited by reactive magnetron sputtering from individual Zr and Si targets. The Si cont ...
