Transition and self-healing process between chaotic and self-organized patterns observed during femtosecond laser writing
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The use of low-energy femtosecond laser beam combined with chemical etching has been proven to be an efficient method to fabricate three-dimensional structures in fused silica. For high-volume application, this technology – like other serial processes – su ...
Non-linear laser-matter interaction offers the possibility to structure transparent material in three dimensions. Here, we demonstrate that such process can be implemented for fabricating novel type of microsystems, including actuators transparent to visib ...
Recently, new types of silica polarization converters fabricated by femtosecond lasers have been introduced. These devices use spatially arranged nanogratings found under certain femtosecond laser exposure conditions in fused silica to create arbitrary pol ...
Fused silica (a-SiO 2) exposure to low-energy femtosecond laser pulses (below ablation threshold) introduces a local increase of the HF etching rate. This property has been used to fabricate a variety of structures ranging from simple fluidic channels to m ...
Controlling magnetization dynamics with a femtosecond laser is attracting interest both in fundamental science and in industry because of the potential to achieve magnetic switching at ever faster speeds. Here, we report a coherent, phase-locked coupling b ...
In this chapter, the use of femtosecond laser to fabricate glass-based microsystems and sensors is examined. Several advanced technology demonstrators are presented, including some very unusual fused silica MEMS. Present technological barriers are discusse ...
Fused silica (a-SiO2) exposure to low-energy femtosecond laser pulses leads to interesting effects such as a local increase of etching rate and/or a local increase of refractive index. Up to now the exact modifications occurring in the glass matrix after e ...
By continuously scanning a femtosecond laser beam across a fused silica specimen, we demonstrate the formation of self-organized bubbles buried in the material. Rather than using high intensity pulses and high numerical aperture to induce explosions in the ...
This paper reports on the mechanical properties of fused silica flexures manufactured by a two-step process combining femtosecond lasers exposure below the ablation threshold and chemical etching. Flexural strengths as high as 2.7 GPa were measured, demons ...
We show the first results of a linear 100-micromirror array capable of modulating the phase and amplitude of the spectral components of femtosecond lasers. Using MEMS-based reflective systems has the advantage of utilizing coatings tailored to the laser wa ...
Spie-Int Soc Optical Engineering, Po Box 10, Bellingham, Wa 98227-0010 Usa2010