Monolithic integration in Fused Silica: When Fluidics, Mechanics and Optics meet in a single substrate
Graph Chatbot
Chat with Graph Search
Ask any question about EPFL courses, lectures, exercises, research, news, etc. or try the example questions below.
DISCLAIMER: The Graph Chatbot is not programmed to provide explicit or categorical answers to your questions. Rather, it transforms your questions into API requests that are distributed across the various IT services officially administered by EPFL. Its purpose is solely to collect and recommend relevant references to content that you can explore to help you answer your questions.
Flexures are mechanical elements used in micro- and precision-engineering to precisely guide the motion of micro-parts. They consist of slender bodies that deform elastically upon the application of a force. Although counter-intuitive at first, fused silic ...
A highly sensitive photo-detector array deposited on a glass substrate with an optional integrated optical filter have been presented. The active element is a vertically integrated hydrogenated amorphous silicon photodiode featuring a dark current of less ...
Ieee Service Center, 445 Hoes Lane, Po Box 1331, Piscataway, Nj 08855-1331 Usa2009
We review our recent work on poly(dimethylsiloxane) (PDMS)-based optofluidic dye lasers using a guided wave distributed feedback (DFB) cavity. We show experimental results of single-mode operation, an integrated laser array, multiple color dye lasing, mech ...
Amplification through stimulated Brillouin scattering in optical fibers can totally modify the polarization properties of the light, enabling an all-optical polarization control and a direct estimate on the fiber birefringence. ...
We demonstrate high-performance nanowire superconducting single photon detectors (SSPDs) on bN thin films grown at a temperature compatible with monolithic integration. NbN films ranging from 150nm to 3nm in thickness were deposited by dc magnetron sputter ...
This study is aimed at outlining the fabrication of a novel piezoresistive force sensor using LTCC technology, which operates at millinewton range, yet is compatible with low cost thick-film fabrication process. Mechanical and electrical characterization o ...
In both scotopic and photopic conditions, the rotation of a grating was found to elicit head movements in mice. The highest spatial frequency eliciting this optomotor response provided an estimate of visual acuity. In male C57BL/6J mice, visual acuity incr ...
We present a novel optical sensor concept that merges integrated optics and micro-mechanics in a monolithic substrate. This concept pushes microsystems integration and defines a new class of monolithic optical microsystems where only optical signals are pr ...
We demonstrate the use of laser-induced. fluorescence confocal spectroscopy to measure analyte-stimulated enhanced green fluorescent protein (egfp) synthesis by genetically modified Escherichia coli bioreporter cells. Induction is measured in cell lysates ...
This paper presents dramatic improvements in the micro-fabrication of three-dimensional microfluidic channels and high-aspect ratio tunnels within the bulk of a fused silica substrate. We also report the fabrication of optical waveguides within the same su ...
