A concept of wireless and passive very-high temperature sensor
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A shear mode resonator based on bulk waves trapped in c-axis oriented AlN thin films was fabricated, simulated, and tested. The active 1.55 mu m thick AlN layer was deposited on top of an acoustic Bragg reflector composed of SiO2/AlN lambda/4 layer pairs. ...
Diffraction gratings integrated with micro-electro-mechanical-systems (MEMS) offer shot noise limited subnanometer displacement detection sensitivities but are limited in detection range for mechanical transducers. A two-wavelength readout method is develo ...
Institute of Electrical and Electronics Engineers2007
The mass sensitivity of an AlN thin film resonators operated in air at 6-8 GHz has been investigated in theory and experiment. The 30 x 30 mu m wide resonators included a 180-300 nm thick, highly oriented AlN thin film, bottom and top electrode, and an aco ...
Bandpass filters for microwave frequencies realized with thin film bulk acoustic wave resonators (FBAR) are a promising alternative to current dielectric or surface acoustic wave filters for use in mobile telecommunication applications. With equivalent per ...
We define the distributed continuous-time combinatorial optimization problem. We propose a new notion of solution stability in aynamic optimization, based on the cost Of change from an already-implemented solution to the new one. Change costs are modeled w ...
Ieee Computer Soc Press, Customer Service Center, Po Box 3014, 10662 Los Vaqueros Circle, Los Alamitos, Ca 90720-1264 Usa2007
Thin film piezoelectric materials offer a number of advantages in microelectromechanical systems (MEMS), due to the large motions that can be generated, often with low hysteresis, the high available energy densities, as well as high sensitivity sensors wit ...
The recent advances made in MEMS and particularly in RF MEMS technology are enabling new architectures for the integration of RF transceivers with improved performance and smaller size. Several fundamental building blocks benefit from the availability of h ...
The region-by-region polarization switching in ferroelectric Pb(Zr,Ti)O-3 thin films sandwiched between Pt electrodes has been directly observed using piezoelectric scanning probe microscopy. A resolution improved by one order-of-magnitude compared to the ...
The miniaturization trend in industry requires micro devices for handling and sensing in a micro environment. As the size of the handled objects decreases and their fragility increases, the demand for sensors with higher force sensitivity and resolution gr ...
Various 1D and 2D scanning probe arrays with integrated piezoresistive sensors have been developed in view of nanobiology and life science applications. For such applications, the experiments need usually to be performed under liquid conditions. The probe ...