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Existing solutions for suspended microchannel resonators packaging - Fluidic delivery (back-side) : PDMS or o-ring sealing - Vacuum encapsulation (front-side) : glass capping or o-ring sealing Our suspended microchannel resonators have inlets and outlets on the front-side - Fluidic delivery and vacuum must coexist : complete solutioon based on o-rings - Need for an intermediary connector, prototyped via stereolithography 3D printing, between the chip and the external equipment We developed a setup for temperature control and fluidic delivery
David Atienza Alonso, Arvind Raj Mahankali Sridhar
Peter Ryser, Yusuf Leblebici, Thomas Maeder, Conor Joseph Slater, Radisav Cojbasic
John Richard Thome, Navid Borhani, Sylwia Szczukiewicz