Experimental setup and o-ring based μfluidic interface for suspended microchannel resonators

Existing solutions for suspended microchannel resonators packaging - Fluidic delivery (back-side) : PDMS or o-ring sealing - Vacuum encapsulation (front-side) : glass capping or o-ring sealing Our suspended microchannel resonators have inlets and outlets on the front-side - Fluidic delivery and vacuum must coexist : complete solutioon based on o-rings - Need for an intermediary connector, prototyped via stereolithography 3D printing, between the chip and the external equipment We developed a setup for temperature control and fluidic delivery