Extreme ultraviolet lithography (also known as EUV or EUVL) is an optical lithography technology used in semiconductor device fabrication to make integrated circuits (ICs). It uses extreme ultraviolet (EUV) wavelengths near 13.5 nm, using a laser-pulsed tin (Sn) droplet plasma (Sn ions in the ionic states from Sn IX to Sn XIV give photon emission spectral peaks around 13.5 nm from 4p64dn - 4p54dn+1 + 4dn-14f ionic state transitions.), to produce a pattern by using a reflective photomask to expose a substrate covered by photoresist.
In physics, coherence expresses the potential for two waves to interfere. Two monochromatic beams from a single source always interfere. Physical sources are not strictly monochromatic: they may be partly coherent. Beams from different sources are mutually incoherent. When interfering, two waves add together to create a wave of greater amplitude than either one (constructive interference) or subtract from each other to create a wave of minima which may be zero (destructive interference), depending on their relative phase.
Optical coherence tomography (OCT) is an imaging technique that uses low-coherence light to capture micrometer-resolution, two- and three-dimensional images from within optical scattering media (e.g., biological tissue). It is used for medical imaging and industrial nondestructive testing (NDT). Optical coherence tomography is based on low-coherence interferometry, typically employing near-infrared light. The use of relatively long wavelength light allows it to penetrate into the scattering medium.
A mercury-vapor lamp is a gas-discharge lamp that uses an electric arc through vaporized mercury to produce light. The arc discharge is generally confined to a small fused quartz arc tube mounted within a larger soda lime or borosilicate glass bulb. The outer bulb may be clear or coated with a phosphor; in either case, the outer bulb provides thermal insulation, protection from the ultraviolet radiation the light produces, and a convenient mounting for the fused quartz arc tube.
Lighting or illumination is the deliberate use of light to achieve practical or aesthetic effects. Lighting includes the use of both artificial light sources like lamps and light fixtures, as well as natural illumination by capturing daylight. Daylighting (using windows, skylights, or light shelves) is sometimes used as the main source of light during daytime in buildings. This can save energy in place of using artificial lighting, which represents a major component of energy consumption in buildings.
Speckle, speckle pattern, or speckle noise is a granular degrading the as a consequence of interference among wavefronts in coherent imaging systems, such as radar, synthetic aperture radar (SAR), medical ultrasound and optical coherence tomography. Speckle is not external noise; rather, it is an inherent fluctuation in diffuse reflections, because the scatterers are not identical for each cell, and the coherent illumination wave is highly sensitive to small variations in phase changes.
An arc lamp or arc light is a lamp that produces light by an electric arc (also called a voltaic arc). The carbon arc light, which consists of an arc between carbon electrodes in air, invented by Humphry Davy in the first decade of the 1800s, was the first practical electric light. It was widely used starting in the 1870s for street and large building lighting until it was superseded by the incandescent light in the early 20th century.
A stepper is a device used in the manufacture of integrated circuits (ICs) that is similar in operation to a slide projector or a photographic enlarger. Stepper is short for step-and-repeat camera. Steppers are an essential part of the complex process, called photolithography, which creates millions of microscopic circuit elements on the surface of silicon wafers out of which chips are made. These chips form the heart of ICs such as computer processors, memory chips, and many other devices.
An LED lamp or LED light is an electric light that produces light using light-emitting diodes (LEDs). LED lamps are significantly more energy-efficient than equivalent incandescent lamps and can be significantly more than most fluorescent lamps. The most efficient commercially available LED lamps have efficiencies exceeding 200 lumens per watt (lm/W) and convert more than half the input power into light. Commercial LED lamps have a lifespan several times longer than both incandescent and fluorescent lamps.
In physics, interference is a phenomenon in which two coherent waves are combined by adding their intensities or displacements with due consideration for their phase difference. The resultant wave may have greater intensity (constructive interference) or lower amplitude (destructive interference) if the two waves are in phase or out of phase, respectively. Interference effects can be observed with all types of waves, for example, light, radio, acoustic, surface water waves, gravity waves, or matter waves as well as in loudspeakers as electrical waves.
