Chemical vapor depositionChemical vapor deposition (CVD) is a vacuum deposition method used to produce high-quality, and high-performance, solid materials. The process is often used in the semiconductor industry to produce thin films. In typical CVD, the wafer (substrate) is exposed to one or more volatile precursors, which react and/or decompose on the substrate surface to produce the desired deposit. Frequently, volatile by-products are also produced, which are removed by gas flow through the reaction chamber.
Plasma parametersPlasma parameters define various characteristics of a plasma, an electrically conductive collection of charged particles that responds collectively to electromagnetic forces. Plasma typically takes the form of neutral gas-like clouds or charged ion beams, but may also include dust and grains. The behaviour of such particle systems can be studied statistically. All quantities are in Gaussian (cgs) units except energy and temperature which are in electronvolts.
Field-reversed configurationA field-reversed configuration (FRC) is a type of plasma device studied as a means of producing nuclear fusion. It confines a plasma on closed magnetic field lines without a central penetration. In an FRC, the plasma has the form of a self-stable torus, similar to a smoke ring. FRCs are closely related to another self-stable magnetic confinement fusion device, the spheromak. Both are considered part of the compact toroid class of fusion devices.
Physical vapor depositionPhysical vapor deposition (PVD), sometimes called physical vapor transport (PVT), describes a variety of vacuum deposition methods which can be used to produce thin films and coatings on substrates including metals, ceramics, glass, and polymers. PVD is characterized by a process in which the material transitions from a condensed phase to a vapor phase and then back to a thin film condensed phase. The most common PVD processes are sputtering and evaporation.
ExponentiationIn mathematics, exponentiation is an operation involving two numbers, the base and the exponent or power. Exponentiation is written as bn, where b is the base and n is the power; this is pronounced as "b (raised) to the (power of) n". When n is a positive integer, exponentiation corresponds to repeated multiplication of the base: that is, bn is the product of multiplying n bases: The exponent is usually shown as a superscript to the right of the base.
Heat transferHeat transfer is a discipline of thermal engineering that concerns the generation, use, conversion, and exchange of thermal energy (heat) between physical systems. Heat transfer is classified into various mechanisms, such as thermal conduction, thermal convection, thermal radiation, and transfer of energy by phase changes. Engineers also consider the transfer of mass of differing chemical species (mass transfer in the form of advection), either cold or hot, to achieve heat transfer.
Pulsed laser depositionPulsed laser deposition (PLD) is a physical vapor deposition (PVD) technique where a high-power pulsed laser beam is focused inside a vacuum chamber to strike a target of the material that is to be deposited. This material is vaporized from the target (in a plasma plume) which deposits it as a thin film on a substrate (such as a silicon wafer facing the target). This process can occur in ultra high vacuum or in the presence of a background gas, such as oxygen which is commonly used when depositing oxides to fully oxygenate the deposited films.
Nonlinear opticsNonlinear optics (NLO) is the branch of optics that describes the behaviour of light in nonlinear media, that is, media in which the polarization density P responds non-linearly to the electric field E of the light. The non-linearity is typically observed only at very high light intensities (when the electric field of the light is >108 V/m and thus comparable to the atomic electric field of ~1011 V/m) such as those provided by lasers. Above the Schwinger limit, the vacuum itself is expected to become nonlinear.
Plasma cosmologyPlasma cosmology is a non-standard cosmology whose central postulate is that the dynamics of ionized gases and plasmas play important, if not dominant, roles in the physics of the universe at interstellar and intergalactic scales. In contrast, the current observations and models of cosmologists and astrophysicists explain the formation, development, and evolution of large-scale structures as dominated by gravity (including its formulation in Albert Einstein's general theory of relativity).
Thermal radiationThermal radiation is electromagnetic radiation generated by the thermal motion of particles in matter. Thermal radiation is generated when heat from the movement of charges in the material (electrons and protons in common forms of matter) is converted to electromagnetic radiation. All matter with a temperature greater than absolute zero emits thermal radiation. At room temperature, most of the emission is in the infrared (IR) spectrum. Particle motion results in charge-acceleration or dipole oscillation which produces electromagnetic radiation.
