Peter Ryser, Thomas Maeder, Yannick Sébastien Fournier, Niklaus Johner, Bamdad Afra
Piezoresistive pressure sensors using classical deformable structures such as membranes progressively run into difficulties at very high pressures (above 1 to 2 kbar), due to the decreasing ratio between the available sensing strain on the outer membrane s ...
2007