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Bamdad Afra

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Related publications (3)

Please note that this is not a complete list of this person’s publications. It includes only semantically relevant works. For a full list, please refer to Infoscience.

Combinatorial Discovery and Optimization of Amorphous HfO2-Nb2O5 Mixture with Improved Transparency

Paul Muralt, Patrik Willi Hoffmann, Silviu Cosmin Sandu, Ali Dabirian, Yury Kuzminykh, Scott Harada, Estelle Wagner, Giacomo Benvenuti, Bamdad Afra

Combinatorial high vacuum chemical vapor deposition (HV-CVD) of mixed HfO2-Nb2O5 thin films has been demonstrated to yield amorphous layers at substrate temperatures where individually deposited pure HfO2 and Nb2O5 films are polycrystalline. Spectroscopic ...

Electrochemical Society2010

Influence of Residual Water and Carbon Containing Molecules in Focused Electron Beam Induced Processes

Focused Electron Beam Induced Processing (FEBIP) is a technique used for etching and deposition of micro- and nano-structures using a focused electron beam. FEBIP is commonly carried out in a Scanning Electron Microscope (SEM) with a Gas Injection System ( ...

EPFL2011

Gas assisted focused electron beam induced etching of alumina

Patrik Willi Hoffmann, Tristan Bret, Bamdad Afra

This study investigates focused electron beam induced etching for the removal of alumina particles on patterned extreme ultra violet (EUV) mask using nitrosyl chloride (NOCl) as assist gas. As potential contaminant, particles of aluminum oxide (alumina, Al ...

2009