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Integration of MEMS in Silicon Photonics

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Integration of MEMS in Silicon Photonics

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A heterogeneously integrated lithium niobate-on-silicon nitride photonic platform

Cascaded all-optical quantization employing step-size MMI and shape-optimized power splitter

Silicon photonic microelectromechanical systems add-drop ring resonator in a foundry process

Low-noise frequency-agile photonic integrated lasers for coherent ranging

Platicon microcomb generation using laser self-injection locking

A new versatile hybrid MEMS technology for high sensitivity, fluid proof sensing applications.

Exceptional points at bound states in the continuum in photonic integrated circuits

Wafer-Level Vacuum Sealing for Packaging of Silicon Photonic MEMS

Shining Diamond: from Micro- and Nano-Engineering to Quantum Photonics

High-yield, wafer-scale fabrication of ultralow-loss, dispersion-engineered silicon nitride photonic circuits